In-line plasma cleaning system
FlexTRAK-2MB Nordson MARCH

The in-line FlexTRAK-2MB system can accommodate a wide range of boat sizes (in one or two lanes), yielding unmatched production flexibility. Its patented chamber technology and proprietary control system deliver high treatment uniformity, excellent process repeatability, and unmatched productivity.

The new FlexTRAK-2MB plasma system is designed for high throughput in-line plasma processing of semiconductor devices held in boats, trays, or other flat carriers, up to 2 boats per plasma cycle. Multiple plasma process modules can be arranged in-line in order to meet the customer's throughput requirements. The patented FlexTRAK™ plasma chamber provides exceptional uniformity and run-to-run process repeatability. The system is designed with a unique "pass-through" boat handling capability, which decreases buffering time and optimizes system productivity.

HIGH-THROUGHPUT PROCESSING
The new FlexTRAK-2MB plasma system's boat handling system provides rapid material transfer for a wide range of boat sizes. Processing can be done with most types of boats, trays and flat carriers. The patented FlexTRAK™ chamber design and control architecture enable short plasma cycle times with very low overhead, ensuring that throughput is maximized and cost of ownership is minimized.