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UV power meter


OAI's Model 306 UV Power Meter is a highly reliable direct reading Instrument designed expressly for measuring light intensity at the wafer plane of mask aligners, UV curing light sources, and any other UV light source. Special probes enable measurement of light in the visible range. Calibration accuracy is within +/- 3% and is NIST traceable. Measurement repeatability is within /- 1%. It is auto ranging from 0.1 to 1999 mw/cm2 full scale and has 1% linearity in this range. This instrument features meter to meter matchability.


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