CS3100 X & Y Movement 100mm x 100mm Cathode Options Tungsten SEI Resolution <3.5nm @ 30kV Accelerating Voltage 30kV CS3200 X & Y Movement 100mm x 100mm Cathode Options Tungsten (Standard) LaB6 (Option) SEI Resolution <3.5nm @ 30kV (W) <2.5nm @ 30kV (LaB6) Accelerating Voltage 40kV (Standard) 50kV (Option) Low Vacuum Model: CS3200LV Chamber Vacuum 1-300Pa (Standard) 2000Pa (Option)