Scanning electron microscope (SEM)
Obducat CamScan
X & Y Movement
100mm x 100mm
Cathode Options
Tungsten
SEI Resolution
<3.5nm @ 30kV
Accelerating Voltage
30kV
CS3200
X & Y Movement
100mm x 100mm
Cathode Options
Tungsten (Standard)
LaB6 (Option)
SEI Resolution
<3.5nm @ 30kV (W)
<2.5nm @ 30kV (LaB6)
Accelerating Voltage
40kV (Standard)
50kV (Option)
Low Vacuum Model: CS3200LV
Chamber Vacuum
1-300Pa (Standard)
2000Pa (Option)
