Ocean Optics

Optical reflectometer
250-1100 nm | NANOCALC series Ocean Optics

The optical properties of thin films arise from reflection and interference. The NanoCalc Thin Film Reflectometry System allows you to analyze the thickness of optical layers from 10 nm to ~250 µm.. You can observe a single thickness with a resolution of 0.1 nm. Depending on your software choice, you can analyze single-layer or multilayer films in less than one second and can measure the thickness and removal rates of semiconductor process films or anti-scratch coatings, hard coatings and anti-reflection coatings.

Features

*Analyze single- or multi-layer films
*Resolution to 0.1 nm
*Ideal for in situ, on-line thickness measurements

Theory of Operation

The two most common ways to measure thin film characteristics are spectral reflectance/transmission and ellipsometry. NanoCalc utilizes the reflectance method and measures the amount of light reflected from a thin film over a range of wavelengths, with the incident light normal to the sample surface.
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