Data acquisition software for Auger spectrometry
Version 5.0 OCI Vacuum Microengineering

• 

  Low energy electron diffraction spectrometer (LEED)
  10mm. 90° | Model BDL450
  
• 

  Auger electron spectrometer (AES)
  50 pA | Models BDL800IR-MCP
  
• 

  Auger electron spectrometer (AES)
  Model BDL600
  
• 

  Low energy electron diffraction spectrometer (LEED)
  15 mm, 77° | Model DLD-L800-ISH
  

• 

  Controller for ion sputter gun
  Model IPS3-D
  
• 

  Programmable controller for electron and ion guns
  MODEL DRS 100
  

• 

  Image analysis software for LEED spectrometry
  Model LIM08
  

Metrology and Measurement software