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turbomolecular pump

Turbomolecular vacuum pump


Typical Applications

Leak detectors
Mass spectrometers
Electron beam microscopy
TV tube manufacturing
Load locks and transfer chambers

Technical Features

Compact design
Operation in any orientation
Cooling by convection is sufficient for most applications
Air and water cooling can be added easily
Oil-free pump for generating clean high- and ultrahigh-vacuum conditions

Advantages to the User

Space-saving
Easy to integrate into complex vacuum systems
Low operating costs
Highly reliable operation also in processes loaded with particles


More specifications...

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Oerlikon Leybold Vacuum

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Oerlikon

 
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