Turbomolecular vacuum pump Oerlikon Leybold Vacuum
Typical Applications
Leak detectors
Mass spectrometers
Electron beam microscopy
TV tube manufacturing
Load locks and transfer chambers
Technical Features
Compact design
Operation in any orientation
Cooling by convection is sufficient for most applications
Air and water cooling can be added easily
Oil-free pump for generating clean high- and ultrahigh-vacuum conditions
Advantages to the User
Space-saving
Easy to integrate into complex vacuum systems
Low operating costs
Highly reliable operation also in processes loaded with particles
More specifications...