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Spectroscopic ellipsometer
omt-optische messtechnik

Spectroscopic ellipsometry is a powerful tool for thin film metrology. omt implements this method in an easy-to-use table-top ellipsometer with an advanced modular optical and mechanical design.

For sophisticated measurements we provide different options like wavelength extension or motorized stages for spatially resolved measurements and auto-focus capabilities.

The spectral ellipsometer utilizes the polarization of light to determine n/k, film thickness (10 nm - 100 µm), or sheet resistance.
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