Laser positioning system
LDS-1000 HP
OPTODYNE LASER EUROPE
applications in MEMS and Nano-technology applications. Conventional methods due to the
low accuracy or short travel range may not meet the current requirement. Recently, Optodyne
has developed a new LDS1000HS, which is a high performance Laser Doppler Displacement
meter with high laser frequency stability of 0.01 ppm, high positioning accuracy of 0.1 μm/m
and high signal-to-noise ratio. This high performance laser system is designed for positioning
feedback or calibration of such ultra-precision stages. The performances of the closed loops
systems are enhanced by the fast response of the measuring system that have typical delay time
of 300ns only. The system is compatible with flat mirrors or path multipliers that duplicate the
resolution at any bouncing.
The major features are: high resolution and high accuracy, non-contact that means no backlash
or memory errors and no need for periodic calibration.
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