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Gas diffuser
15 - 150 slpm, 15 psig | ChamberKleen™ PALL

Gas diffusers are ideally suited for vent applications on load lock interfaces or other vacuum chambers where large volumes of gas are flowing in a short amount of time. The Pall ChamberKleen™ 1100 and 5500 Series diffusers combine a stainless steel filter and a unique diffuser membrane that allows flow in 360 degrees. This combination allows large volumes of gas to flow in a uniform manner, limiting the disturbance of particles in the chamber. Consequently, fast vent times can be achieved with little particle disturbance.

* Reduces turbulent gas flow during venting of process chambers
* 360° diffuser design optimizes gas flow
* 316L stainless steel filter medium
* 316L stainless steel diffuser
* Cleanroom manufactured and packaged
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standListOtherProduct www di En 2012-06-22-01