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Optical profilometer UA3P series
3Dinterferometricatomic force

optical profilometer
optical profilometer
optical profilometer
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Characteristics

Technology
optical, 3D, interferometric, atomic force, stylus
Applications
industrial
Configuration
mobile
Other characteristics
automatic

Description

The Panasonic UA3P profilometer series is designed to measure aspherical lenses & molds, semiconductor wafers, and any other precision component requiring nanometer level accuracy ranging up to 200mm x 200mm. Different machine models are available to meet your optical & high aspect ratio metrology needs. The UA3P-300, UA3P-4 and UA3P-5 all offer users the accuracy of AFM technology with the measurement range of a CMM. Our unique approach uses atomic force probe technology in the stylus and HeNe laser-based interferometric XYZ axis positioning. Couple this technology with a solid granite-base and you have a robust metrology system that can be used on the factory floor and still deliver 0.1um level total uncertainty. • The UA3P can measure aspherical lenses and free-form mirrors and their molds, which are essential for digital consumer electronics such as mobile phones, DSCs, DVDs, and Blu-ray recorders, as well as in home security, optical communications, and vehicle H • Ultra-accurate measurement in only 3 minutes • Automatic NC program generation • Extensive library of optional software • Easy operation supports rapid feedback to machining Outer Dimensions (W x D x H) mm - 700 x 780 x 1,500 Mass of Main Body - 700 kg (Others: 150 kg) Measuring Range (X, Y, Z axes) mm - 30x30x20 Measured Object Placement Area (X, Y, Z axes) mm - 100x100x100 Measuring Probe - AFP Resolution - 0.3nm Max. Inclination Angle for Top-Surface Measurement - 75º

Catalogs

UA3P
UA3P
4 Pages
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.