Atomic force microscope (AFM) for metrology applications Park Systems Inc

The XE-200 is an AFM with increased capacity that supports 200 mm wafer investigation. In addition to the precise scan performance provided by True Non-Contact mode, the XE-200 offers users an encoded XY stage that travels over the entire 200 mm x 200 mm sample area, an enlarged XY scan range of 200 μm x 200 μm, and a Z scan range of 25 μm. Also, the industrial-grade automation features of the instrument greatly minimize the user‘s required participation during system operation.

- Supports up to 8 inch wafer
- 200 μm × 200 μm XY scan range
- 25 μm Z scan range
- Industrial-grade acoustic enclosure with steel frame
- Fully motorized XY stage travels entire 200 mm × 200 mm

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