Atomic force microscope (AFM) for automated in-line wafer inspection
XE-Wafer Park Systems Inc.

The XE-WAFER is a fully automated industrial AFM designed specifically to address surface roughness, trench width, depth and angle measurements on 200mm & 300mm wafers in a production environment. The system provides superior accuracy and precision nanometrology than any in the market today. Providing the highest resolution and the lowest gage sigma value imaginable for repeatability and reproducibility in the world, the XE-WAFER is the perfect solution for the semiconductor and hard disk drive industry which, until now, had very limited choice of industrial grade in-line inspection tools. We, Park Systems, take pride in providing you with the metrology solution you have been longing for.

- Allowable Sample Size (Up to 300mm Wafers)
- Allowable Scan Size (100 μm x 100 μm, Optional: 200 μm x 200 μm)
- Automatic Data Acquisition & Analysis of High Aspect Ratio Trench Features on Wafers
- Acoustic Enclosure with Built-in Anti Vibration Isolation System
- Designed Specifically for Production Facilities