Rated to 10-10 Torr, this multi-axis stage uses high resolution piezo motors on the X/Y axes to eliminate servo dither and provide a .1µm resolution. The system features high resolution and smooth scanning capability allowing it to move a 300mm wafer under an analyzing sensor inside a suction chamber. The X/Y sits on top of a Z wedge stage to provide vertical positioning, controlling the distance to the object. This completely integrated system features servo and piezo motor professional amplifiers and a 3-axis motion driver.
