Laser particle counter
Micro 101 HP
Particle Measuring Systems
* Speed qualification of process gas distribution systems
* Detect particles in gases before they impact yield
* System incorporates two devices: a sampling sensor and a data system
* Verify specifications
* Detect process upsets
* Quantify impact of system changes
* Accurate particle sizing
* Compatible with Facility Net data management system for comprehensive data storage, management, reports, and alarms
* Passive cavity design requires infrequent maintenance
* Unlike other systems, the Micro LPC-101 HP requires no fluids for monitoring
* Samples inert pressurized gases at their line pressure
* Improved Process Control
* Reliable
