How do you measure cleanliness of the tool after a PM? Pentagon Technologies’ QIII+® can dramatically reduce PM recovery time, green-to-green time, and increase the overall throughput of the fab. Using the QIII+®, you can immediately detect particles to 0.3 micron and localize them within a production tool. This proactive approach to PM cycles will result in savings of up to 30% on PM times and a reduction in particle adders by 50% or more. The result of starting clean is first-time recovery with dramatically lower adders at all particle sizes making your process tools significantly more productive.