Maglev hybrid turbomolecular vacuum pump
500 - 3200 l/s | ATH M series
Pfeiffer Vacuum
High throughput applications
adixen's Maglev series (from ATH 500 M to ATH 3200 M) are designed for high pressure, high throughput and robust pumping needed for industry applications such as semiconductor, FPD, coating, photovoltaic and other applications.
Corrosion proof features
- Automatic balancing system
- Built-in 75°C heating system
- 5 active axes
- Inert gas purge
A compact and modern design
- On board controler and rack controler for all installation needs
- Adjustable rotational speed for optimizing pumping parameters
- Very high MTBF
- Low cost of ownership
- Low noise and vibration levels
- Battery free
Applications
- Semiconductor processes (etch, CVD, ion implant)
- Flat panel display manufacturing
- Photovoltaic manufacturing
- Glass coating
- Coating and thin films deposition
- Micro systems machining
- Lithography
- Ion beam rectification
- Electron microscopy
- Space simulation chambers
- Particle accelerators
- Ion milling
- And many R&D experiments
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