Metering valve
Pfeiffer Vacuum
In addition to the shut-off function, specially designed valves are also employed for gas dosing in a vacuum process.
- Minimum dead volume
- Operating temperature up to 200 °C
- For mass spectrometer applications
- Specific routing of gas stream when a capillary (accessory) is used
- Minimum dead volume
- Operating temperature up to 200 °C
- For mass spectrometer applications
- Specific routing of gas stream when a capillary (accessory) is used
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