turbomolecular vacuum pump / oil-free / single-stage
HiPace 1500 series Pfeiffer Vacuum

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Characteristics

  • Technology:

    turbomolecular

  • Lubrication:

    oil-free

  • Number of stages:

    single-stage

  • Flow rate:

    Max.: 1,450 l/s (383.05 us gal/s)

    Min.: 0 l/s (0 us gal/s)

Description

HiPaceTM 1500 is a powerful turbopump offering pumping speed of about 1450 l/s. It is capable of high pumping speeds for light and heavy gases, providing high gas throughputs. The device also offers high process integrity and is resistant to particulate matter.