turbomolecular vacuum pump / oil-free / single-stage
HiPace 1500 series
Number of stages:
Max.: 1,450 l/s (383.05 us gal/s)
Min.: 0 l/s (0 us gal/s)
HiPaceTM 1500 is a powerful turbopump offering pumping speed of about 1450 l/s. It is capable of high pumping speeds for light and heavy gases, providing high gas throughputs. The device also offers high process integrity and is resistant to particulate matter.