Roots pump vacuum unit / dry / industrial / multi-stage
DRS series Pfeiffer Vacuum

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Characteristics

  • Configuration:

    Roots pump, dry

  • Applications:

    industrial

  • Other characteristics:

    multi-stage

  • Flow rate:

    Max.: 250 m³/h (8,828.67 ft³/h)

    Min.: 190 m³/h (6,709.79 ft³/h)

Description

The Dry Roots Pumping station by Pfeiffer Vacuum supplies which comprises of root pumps together with multi-stage backing pumps. This pumping stations provide us an advance answer for the growing demand in industrial processes such as semiconductor industry. Plus its protective equipment in the pumping station are reduced so that it can undergo processes which requires a less stringent for immediate load lock application or as backing pumps for sputtering processes. The product's advantages such as dry, oil-free suction chamber and optimized pump capacity together with high reliability can lead us to such application may it be in coatings, metalurgy, chemical industry and much more.