turbomolecular vacuum pump / oil-free / single-stage / compact
ATH 500 M series Pfeiffer Vacuum



  • Technology:


  • Lubrication:


  • Number of stages:


  • Other characteristics:

    compact, hybrid

  • Flow rate:

    550 l/s (145.29 us gal/s)


The ATH-M series provides a combination of the new hybrid turbomolecular vacuum pump and modern technology of magnetic bearings for mid-sized use. It has a close-packed design merged with control electronics to ensure high reliability of 5-axis, maglev rotor suspension to 300-500L/sec as small as DN100 flanges. The ATH 500 MT is the heated version of this product which is suitable for corrosive use like etch processes in semiconductor manufacturing. It has an air-cooled version for installations in research labs.