turbomolecular vacuum pump / oil-free / single-stage
ATP 2300 M series Pfeiffer Vacuum

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Characteristics

  • Technology:

    turbomolecular

  • Lubrication:

    oil-free

  • Number of stages:

    single-stage

  • Flow rate:

    Min.: 0 l/s (0 us gal/s)

    Max.: 2,050 l/s (541.55 us gal/s)

Description

This ATP 2300M is uniquely designed and well engineered so as to be able to deliver on very tough conditions. The pump is especially suitable for various vacuum applications that require high gas throughput combined with very high speeds. The pump is very efficient and reliable as it can handle gas speeds of up to 3000 sccm N2. With this very high performance, the pump can be well used in harsh applications such as as the Semi-Conductor Implant, coating, R&D and HDPCVD.