Turbomolecular vacuum pump
3000 l/s | HiPace 3400 MC series Pfeiffer Vacuum

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  Roots type rotary lobe vacuum pump
  4900m³/h | Okta 4000 series
  

Vacuum pumps

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  Maglev hybrid turbomolecular vacuum pump (integrated controller)
  300 - 500 l/s | ATH 500M
  
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  Turbomolecular vacuum unit
  80 - 500 l/s
  
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  Two stage rotary vane vacuum pump
  1 / 3 ø, 2.5 m³/h | DUO 2.5 series
  
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  Dry screw vacuum pump
  220 / 265 m³/h | Hepta 200 series
  
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  Roots pump vacuum unit
  2.1 - 3 mbar | CombiLine WU
  
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  Turbomolecular vacuum pump
  max. 53 l/s; DN 63 CF-F
  
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  Single-stage rotary vane vacuum pump
  300 / 360 m³/h, 3 ø, 380 - 830 V, 50 / 60 Hz | Hena 300
  
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  Single-stage rotary vane vacuum pump
  400 / 480 m³/h, 3 ø, 380 - 830 V, 50 / 60 Hz | Hena 400
  
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  Single-stage rotary vane vacuum pump
  1000 / 1200 m³/h, 3 ø, 380 - 830 V| Hena 1000
  
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  Two stage rotary vane vacuum pump
  3 ø, 65 m³/h | DUO 65 series
  
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  Turbomolecular vacuum pump
  IP 54, 1700 l/s | HiPa 1800 series
  
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  Turbomolecular vacuum unit
  7.5 - 30 l/s | Drytel 1025 series
  
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  Maglev hybrid turbomolecular vacuum pump
  500 - 3200 l/s | ATH M series