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photoelectron spectrometer

X-ray photoelectron spectrometer (XPS)


Overview

The Quantera, PHI's second generation Scanning X-ray Microprobe provides the sensitivity and tools needed to apply XPS surface analysis to a broader range of current and future product development and failure analysis needs. High performance micro-area spectroscopy, XPS depth profiling, automated insulator analysis, and robotic sample handling define a new generation of XPS surface analysis equipment for today's laboratory.

Important features of the Quantera SXM include:

- Patented scanning x-ray microprobe design with <9um diameter minimum x-ray beam size
- Complete XPS capabilities (spectroscopy, depth profiling, mapping, etc.) at all x-ray beam sizes
- Highest performance XPS instrument for thin film depth profiling
- Optional C60 sputter ion gun for organic / polymer depth profiling
- Automated effortless analysis of electrically insulating samples
- Accurate quantitative analysis
- Robotic sample handling
- A completely automated, easy to use instrument platform

Micro area spectroscopy and high performance thin film analysis capabilities open new areas of application for XPS surface analysis in all environments. The complete automation of the system makes it easy to use and increases the reproducibility of routine measurements. Large sample platens make it possible to analyze “real world” large samples or multiple small samples automatically. A new generation of XPS surface analysis instruments are available today from PHI.


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Physical Electronics Inc.

 
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