High-load piezo linear actuator
max. 800 N, max. 20 mm | PiezoWalk® series
Physik Instrumente
Semiconductor technology
Semiconductor testing
Wafer inspection
Nano lithography
Nano-imprinting
Nanometrology
Active vibration damping
Motion in strong magnetic fields
N-216 NEXLINE® high-load linear actuators are ultra-precision nanopositioning actuators with travel ranges to 20 mm and push / pull forces to 600 N. The operating principle is based on coordinated motion of a number of highly preloaded linear and shear piezo elements acting on a runner. NEXLINE® drives combine long travel ranges with piezo-class precision.
N-216 comes in two versions for open- or closed-loop operation, as well as in two different load configurations. Closed-loop versions are equipped with a linear encoder for direct position measurement of the moving runner. The encoder features 5 nm resolution over the full travel range. In open-loop operation a positioning resolution to 30 picometers can be realized by use of the high-dynamics analog operation mode.
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