Long travel piezoelectric positioning stage Physik Instrumente
PIHera®

- Travel to 1800 µm
- Compact piezo stage design
- Resolution <1 nm
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions

P-620.1CD - P-629.1CD PIHera® piezo stage systems are flexure guided nanopositioning linear slides featuring travel ranges from 50 to 1800 µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range).

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