Long travel piezoelectric positioning stage
PIHera®

XY-Travel to 1800 µm
Compact Design
Resolution <1 nm
Frictionless Precision Flexure Guiding System
PICMA® High-Performance Piezo Drives
Direct Metrology with Manufacturer of capacitive sensors for Highest Precision
Up to 0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible Versions

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