Long travel piezoelectric positioning stage
max. 1 500 x 1 500 µm Physik Instrumente

Closed-Loop Travel Range 800 x 800 µm (up to 1500 µm Possible)
Improved Straightness of Travel <1nm
High-Precision, Cost-Efficient
Resolution to 0.1 nm, 0.02% Positioning Accuracy
Frictionless, High-Precision Flexure Guiding System
Outstanding Lifetime Due to PICMA® Piezo Actuators

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Products by category

Position Measurement
- Capacitive displacement sensors

Metrology and Test Equipment
- Outside micrometers, Thickness gauges

Inspection and Surveillance
- FEM microscopes, X-ray microscopes, Electron microscopes
- Signal conditioners

Optical Components
- Other Laser components

Motors and Motor Control
- Piezoelectric motors and actuators
- Motion controllers
- Stepper motor controllers

Actuators and Positioning Systems
- Electric linear actuators
- Lifting columns and Other electric actuators
- Single-axis motorized linear positioning stages
- Motorized rotary positioning stages
- Vacuum compatible positioning stages
- Nano-positioning stages
- Micro-positioning stages
- Other positioning stages