Physik Instrumente

Micrometer driven translation stage
max. 18 mm Physik Instrumente


P-853/P-854 PiezoMikes are micrometer drives with integrated high-resolution piezo linear drives. They can be operated manually, like standard micrometer drives. Sensitivity of the micrometer is 1 µm. By controlling the piezo voltage, the micrometer tip is automatically moved in and out (up to 25 µm) relative to the manually set position. Resolution of the piezoelectric motion is in the sub-nanometer range. The PiezoMike can therefore be used as a remotely controlled fine positioning element.

Working Principle
A sophisticated wire EDM (electric discharge machining) flexure motion amplifier doubles the displacement of a piezo linear actuator. It also serves as a linear guide to the micrometer drive, which is moved back and forth when the piezo drive voltage is changed. This design is compact and mechanically stable.

PiezoMike Applications
The PiezoMike can be mounted like a micrometer drive by clamping around the sleeve.

The P-853.00 is equipped with a 6 mm holding flange and can be directly attached to M-311 miniature translation stages (see www.pi.ws). The P-854 can be attached to the M-105 linear positioners
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