Miniature piezo nano-positioning stage with sub-nanometer resolution
Unique Design: Both Stage and Actuator suppliers
Frictionless Precision Flexure Guiding System
0.05 nm Resolution
Direct Metrology with Capacitive detectors for Highest Precision
Ultra-Fast Response, Very Compact
PICMA® High-Performance Piezo Drives
ID-Chip for AutoCalibrate Function
Vacuum Versions Available
