Piezo-positioner for precision machining Physik Instrumente

Flexure guided piezo stage positioners are used in a variety of applications from semiconductor manufacturing to precision machining.

PI introduced the first line of piezoelectric actuators more than 35 years ago. The technology's unique features such as: responsiveness; stiffness; life time and infinite resolution, have opened many markets since then, from semiconductor testing to precision machining. Typical piezo tools for precision machining are equipped with special waterproof casings which also provide the mechanical interface to the tooling machine and the tool servo.
Integrated metrology systems feature resolution in the nanometer and sub-nanometer range for closed-loop operation with digital or analog motion controllers. Flexure guiding mechanisms and motion amplifiers provide long traveling ranges and protect the piezo ceramics from off-axis forces.

PI piezo actuator systems are used throughout the world, often in applications that run 24 hours a day, seven days a week. They improve the manufacturing precision of optics, crank shafts, bearings, cylinders, pistons, etc. in crucial processes such as diamond turning, milling, grinding, out-of-round boring or wear-compensation of tools.

Custom-manufactured high-performace piezoceramic actuators provide lifetimes of billions of cycles. Power amplifiers with energy recovery and 2000 W peak power are available for high-dynamics applications.

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