Piezo scanner for AFM, SPM microscopy, sub-nm linearity Physik Instrumente

- Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
- Compact Manipulation Tool for Nanotechnology
- Resonant Frequency 9.8 kHz
- Ultra-High-Precision Capacitive Feedback
- Parallel-Motion Metrology for Highest Linearity and Stability
- 50 Picometers Resolution
- 5 x 5 x 5 µm Travel Range
- Very Small Package
- Rugged Piezo Stage design provides highest precision and lifetime.

Ultra-High-Performance Piezo Stage Scanner/Manipulator for Nanotechnology
The P-363 PicoCube® XY/XYZ is an ultra-high-performance closed-loop piezo scanning system. Designed for AFM, SPM and nanomanipulation applications, it combines an ultra-low inertia, high-speed XY/XYZ piezo scanner with non-contact, direct-measuring, parallel-metrology capacitive feedback capable of 50 picometers resolution. On top of being extremely precise, the PicoCube® system is also very small and rugged. Measuring only 30 x 30 x 40 mm (30 x 30 x 26 mm for XY version), it is easy to integrate in any scanning apparatus.

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