• Guided stage and actuator at the same time
• Travel range to 38 µm
• Resolution 0.1 nm
• Nonmagnetic versions available
• Particularly fast response behavior due to direct drive
• Highest linearity due to capacitive sensors
• Scanning microscopy
• Measuring technology
• Test procedures and quality assurance
• Photonics
• Fiber positioning
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Higher stiffness and dynamics due to PICMA® direct drive
Piezo nanopositioners with PICMA® direct drive have no mechanical translation. This allows fast response speeds as well as the highest possible stiffness and dynamics in the piezo drive range.