Rotary stage Q-632 Motion®

piezoelectriccompactvacuum-compatible

• Only 32 mm in width and 8 mm in height • Direct position measurement with incremental encoder with 0.75 µrad resolution (optional) • Up to 3 µrad minimum incremental motion • Rotation range >360° • Velocity 45 °/s Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 45 °/s Application fields Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing.