Ultrasonic piezo motor, linear and rotary

Piezo linear motors can be divided into two groups: resonant motors (ultrasonic motors), and non-resonant motors. Both can, in principle, attain unlimited travel, yet they are very different in their design, specifications and performance.
Resonant motors are characterized by a simpler design and higher speeds, piezo step motors can achieve much higher resolution, forces and - over small distances - dynamic performance.

A great advantage of piezo motors is their intrinsic steady-state auto-locking capability. It does away with servo dither and the accompanying heat generation, an undesirable feature of electromagnetic motors. Step and continuous piezo motors are in principle nonmagnetic and vacuum-compatible, a requirement for many applications in the semiconductor industry.

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