Ultrasonic piezo motor, linear and rotary Physik Instrumente

Piezo Stepping Linear Motors for Nanopositioning and PicoPositioning and High-Speed Ultrasonic Piezo Motors for Automation:


PI provides two types of piezo linear motors: PILine® ultrasonic motors, also referred to as resonant motors, and NEXLINE® PiezoWalk® motors. Both can, in principle, attain unlimited travel, yet they are very different in their design, specifications and performance.

PILine® resonant motors are characterized by a simple design and high speed to 800 mm/s.
NEXLINE® & NEXACT® stepping motors are more complex but can achieve much higher resolution, forces and dynamic performance (analog mode).

A great advantage of piezo motors is their intrinsic steady-state auto-locking capability. It does away with servo dither and the accompanying heat generation, an undesirable feature of electromagnetic linear motors. Step and continuous piezo motors are in principle nonmagnetic and vacuum-compatible, a requirement for many applications in the semiconductor industry.

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