Motorized rotary table with sub-micro-rad precision
piezosystem jena
rotary stroke up to 9 mrad / 11 mrad
high dynamical performance
high planar behavior
well centered, defined axis of rotation 0,2 µrad / 0,02 µrad resolution
3mm free aperture
integrated temperature compensation
applications:
fast scanning
lithography
laser beam steering ...
The ROTOR 10 and the ROTOR 10 SG one axis low voltage rotary stage is a development within our ultra-fast ROTOR- line. It provides a long steering and scanning range of up to 11mrad.
The well defined axis of rotation is located centrically.
An incorporated free aperture allows axial beam applications also.
-
zoom
