Typical Spezifications Diameter Tolerance + 0.000 / - 0.005 " Thickness Tolerance +/- 0.001 " Parallelism (plano) 99.8 % Reflection AOI 45° s-po > 99.8 % Reflection AOI 45° p-pol > 99.5 % Phase Shift AOI 45° 75 % Material Si, SiC