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pressure sensor

Piezoresistive pressure sensor

Miniature ESP electronic pressure industrial scanners are differential pressure gauging units consisting of an array of silicon piezoresistive pressure sensors, one for each pressure port.

The sensors are mounted on a common hybrid glass substrate using a proprietary technique which maximizes long term stability. The outputs of the sensors are electronically multiplexed through a single onboard instrumentation professional amplifier at rates up to 20,000 Hz using binary addressing. The multiplexed amplified analog output is capable of being driven through long lengths of cable to a remote A/D industrial converter.

The ESP scanners also incorporate a two position manifold actuated by momentary pulses of control pressures. When placed in the calibrate position, all sensors are connected to a common calibration pressure port. A series of accurately measured pressures can be applied through this port to characterize the sensors, in place, at the condition to which they are being subjected. Proper and periodic online calibration maintains static errors within ±0.05% of the full professional scale (FS) pressure range. The calibration manifold automatically switches between two common reference pressures to ensure a stable reference is applied during calibration. The calibration manifold incorporates a visual position indicator and utilizes a dynamic o-ring industrial seal design for high reliability and easy servicing in the field.

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