The SAM 400 is a high-performance tool enabling non destructive acoustic investigations for dedicated high throughput analysis, quality control and research applications. It features a new high speed maintenance free stage and new rf and transducer technologies of up to 400 MHz, controlled through a user friendly graphical interface.
Built to semiconductor industry standards around a core platform that utilizes the latest production and research technology, the SAM 400 can accurately handle wafers up to 300 mm and samples up to 660x860x60 mm (w/l/h). Ultrasound frequencies range up to 500 MHz with transducers from 10 MHz - 400 MHz. Different tank sizes and trays are available.
Scanning range: x=250 µm-430 mm, y=250 µm-430 mm, z=100mm