Interferometer QED Technologies
ø200mm
The SSI overcomes the limitations of normal interferometers to provide full-aperture metrology for high-numerical-aperture (NA) and large-clear-aperture (CA) parts up to 200 mm in diameter:
Capable of measuring high-NA components with numerical apertures up to 1 (full hemispheres!)
Plano, convex, or concave surfaces up to 200 mm diameter