Analog thermal mass flow controller
QUALIFLOW
D07-16A is a metal sealed MFC with advanced analog electronics. Full scale flows as low as 5 sccm. Suitable for high inlet pressure applications. Drop-in replacement for most standard MFCs.
AFC 50, AFM 55 are suitable for flow rates from 10sccm to 30slm, featuring a unique reliable horizontal electromagnetic valve.
AFC 261, AFM 361: Based on the same technology than as the 260 and 360 series, they each can handle flow rates from 10slm to 20slm.
