Digital thermal mass flow controller
QUALIFLOW
AFC 50 D, AFM 55 D, suitable for high performance from 10sccm to 30slm with elastomeric seals in standard.
AFC 80 MD, AFM 85 MD are dedicated to systems using reactive gas from 10sccm to 30slm. All metal seals, ultra clean finish and no particle generation.
MC-3000, MC-4000 and MC-5000 are built to answer the most demanding 300mm applications (APCVD, LPCVD, MCVD, Etching processes, etc...): new generation piezoelectric valve, all metal seals with the full potential of digital technology.
