The SRX is a digital PID controller with a high speed sampling time of 25 ms (0.025 sec) with high-resolution thermocouple, RTD and current voltage input, supplied with parameters settable in 1/100 sec. Application in RTP (Rapid Thermal Process), RTA (Rapid Thermal Anneal) and pulse heat temperature control of flip chip bonders in semiconductor manufacturing can be controlled by the SRX. The high speed sampling function also makes it suitable for additional application requirements such as pressure and flow rate.
