Rotary union for the semiconductor industry Rotary Systems

The multiple passage rotary union that is shown was designed and manufactured for wafer processing equipment. This union was designed to pass multiple medias without cross contamination between passages.

This rotary union is made from stainless steel and was designed to pass air, vacuum and wafer processing slurry. This is only one example of a union that we have designed for the Semi-conductor industry. We currently have several large OEM's that we provide custom unions for in this industry.

If you have a custom rotary union application, please contact our Technical Sales department at 1-800-959-0146.

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