The rotary union pictured was designed to pass pneumatics and/or DI water for a Chemical Mechanical Planarization (CMP) piece of Semi-conductor equipment. The union is manufactured from 316 stainless steel and the shaft is hard chromed on the seal surface for hardness. We currently provide a number of multiple passage rotary unions to the Semi-conductor industry in the CMP field.
Please contact our Technical Sales Staff for your specific requirement.
