Measuring device with ellipsometry technology for semiconductor industry S3000A™, S3000S™
Rudolph Technologies
The S3000A™ System is a production worthy, high-performance transparent metrology tool for fab-wide applications. It incorporates Rudolph's Focused Beam ellipsometry technology which was developed for demanding diffusion applications. The value-engineered S3000A is designed for transparent film applications in the litho, etch, thin films, and CMP areas.
