floor-standing gas purifier / filter / nitrogen
SAES Pure Gas
Max.: 3,000 m³/h (105,944 ft³/h)
Min.: 15 m³/h (529.7 ft³/h)
The Nitrogen MegaTorr Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS9 series uses dual catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CH4, CO, CO2, H2, H2O and O2 are reduced to below parts per billion (ppb) levels. If CH4 removal is not required the PS8 Adsorber Only Purifier can be used.