MBE system UHV PLD

The combination of a MULTIPROBE Compact System with a PLD preparation chamber allows in-situ studies of the electronic and physical structure of epitaxially grown binary and complex oxide-surfaces and interfaces, for example perovskites such as LaAlO3, SrTiO3, LaMnO3. The analysis chamber for structural analysis of the samples is equipped with a variable temperature STM with Qplus AFM sensor. The SPHERA U5 Electron Analyser and the DAR400 Dual Anode X-Ray source allow for the analysis of the electronic structure of the films. The PLD chamber is equipped with a sample manipulator which is able to run in an oxygen-rich environment, a target stage with up to 5 targets and a high pressure RHEED which allows for in-situ characterisation of the grown films.