Analog thermal mass flow controller Sensirion

All CMOSens® mass flow controller (MFC) offer fast and accurate control of gas flows over a very wide range. The overall performance of a MFC depends mainly on the mass flow sensor used in it. The leading performance of Sensirion MFC is based on Sensirion's unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip.

The digital calibrated and temperature compensated sensor signal is converted directly on the CMOSens® chip into a signal which is used in the analog or digital controlling circuit to control the valve. This results in very high accuracy, fast settling time and large dynamic range.

CMOsens® mass flow controllers are highly suitable for a variety of applications like dry etching, surface coating, gas mixing, gas analysis, and many others.

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