Analog thermal mass flow controller for gas
SFC4000 Sensirion

Sensirion's mass flow controllers (MFC) offer fast and accurate control of gas flows over a very wide range. The high performance of the MFC is mainly based on the CMOSens® mass flow sensor used in it. The latter is characterized by Sensirion's unsurpassed sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip.
The digital calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the analog controlling circuit to control the valve. This results in very high accuracy, fast settling time and a large dynamic range.
The mass flow controller SFC4000 measures with highest precision and speed. It offers an analog interface (0 - 5 V) in standard mechanical dimensions. Required power supply is unipolar 14 to 24 Vdc