Digital thermal mass flow controller
SFC3000
Sensirion
Sensirion's SFC3000 is a digital mass flow controller for high-volume OEM applications. It offers fast and accurate control of gas flows over a very wide range. The digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve. This results in very high accuracy, fast settling time and a large dynamic range. The mass flow controler's excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.
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